Analysis and Design Principles of MEMS Devices
Bao, Min-hang
Analysis and Design Principles of MEMS Devices - Amsterdam Elsevier science 2005 - xii, 312p.
9780444516169
Microelectromechanical systems
621.381 / Bao
Analysis and Design Principles of MEMS Devices - Amsterdam Elsevier science 2005 - xii, 312p.
9780444516169
Microelectromechanical systems
621.381 / Bao