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Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.

By: Contributor(s): Material type: TextTextPublication details: New York : Springer Science+Business Media, 2003.Description: ix, 208 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)Content type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9780306474972
Other title:
  • Principles of plasma processing
Subject(s): DDC classification:
  • 621.044 CHE
Online resources:
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Holdings
Item type Current library Collection Call number Copy number Status Notes Date due Barcode Item holds
Reference Reference IIT Goa Central Library Reference Reference 621.044 CHE (Browse shelf(Opens below)) 1 Reference IN37944/26-27||02-09-2026||44.00%||EUR 149.99 4729
Total holds: 0