Atta,C. M. Van  <br/><br/>
Vacuum Science and Engineering 

 - New York  McGraw Hill  1965 
 - xiv, 459p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology
<br/><br/><label>Dewey Class. No.: </label>621.55  / Att