Chen, Francis F.,  1929- <br/><br/>
Lecture notes on principles of plasma processing / 
 Principles of plasma processing 
Francis F. Chen and Jane P. Chang. 
 - New York :  Springer Science+Business Media,  2003. 
 - ix, 208 p. :  ill. ;  28 cm.  + 1 CD-ROM (4 3/4 in.) 
<br/><br/><label>ISBN: </label>9780306474972 
<br/><br/><label>LCCN: </label>2002040665 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering.<br/>Plasma chemistry.<br/>Plasma dynamics.
<br/><br/><label>Dewey Class. No.: </label>621.044  / CHE