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Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.

By: Contributor(s): Material type: TextTextPublisher: Beverly, MA (US): Scrivener Publishing, [2013]Copyright date: ©2013Edition: 2/eDescription: xv, 253 p : illustrations ; 25 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9781118062777
Subject(s): DDC classification:
  • 620.5 KAA
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Holdings
Item type Current library Collection Call number Copy number Status Notes Date due Barcode Item holds
Reference Reference IIT Goa Central Library Reference Reference 620.5 (Browse shelf(Opens below)) 1 Reference NPH/26-27/IN-00095||05-05-2026||33.00%||USD 226.95 4687
Total holds: 0

Includes bibliographical references and index.