000			00350nam a2200133Ia 4500
008			190215s9999||||xx |||||||||||||| ||und||
082			_a621.55 _bAtt
100			_aAtta,C. M. Van _91789
245		0	_aVacuum Science and Engineering
260			_aNew York _bMcGraw Hill _c1965
300			_axiv, 459p.
650			_aVacuum technology _91790
942			_cBK _05
999			_c517 _d517