000			00465nam a2200157Ia 4500
008			190215s9999||||xx |||||||||||||| ||und||
020			_a9781606508831
082			_a620.193 _bMad
100			_aMadou, Marc J.
245		0	_aCarbon: The Next Silicon?: Book 2 - Applications
260			_aNew York _bMomentum Press _c2016
300			_axxiv, 195p.
650			_aMicroelectromechanical systems
700			_aPerez-Gonzalez, Victor H; Pramanick, Bidhan.
942			_cBK
999			_c713 _d713